Quartz glass elements

ABSTRACT

Quartz glass element, such as a diffusion tube useful in the production of semiconductor elements, capable of forming an outer layer of uniformly fine crystalline silica such as cristobalite or tridymite when heated to a temperature at which such crystalline silica forms containing crystallization promoting nuclei having a rate of diffusion in quartz glass less than that of sodium at elevated temperatures. Such nuclei are preferably present in the outer half of the element wall. When the quartz glass element is exposed to elevated temperatures, the nuclei promotes the formation of the outer layer of uniformly fine crsytalline silica which imparts thermal dimensional stability for extended periods of use at elevated temperatures.

United States Patent Baumler et a1.

QUARTZ GLASS ELEMENTS Heraeus-Schott Quarzschmelze Gmhll, l-lanau,Germany Assignee:

Notice: The portion of the term of this patent subsequent to Dec. 4,1990, has been disclaimed.

Filed: July 27, 1973 Appl. No.: 383,432

Related u.s. Application Data Division of Ser. No. 166,844, July 28,1971, Pat. No. 3,776,809, Continuation-impart of Ser. No. 793,775, Jan.24, 1969, abandoned, Continuation-impart of Ser. No. 810,713, March 26,1969, abandoned,

Foreign Application Priority Data Feb. 22, 1968 Germany...., 1696061Mar. 30, 1968 Germany i 4. 1771077 Mar. 30, 1968 Germany 1988697 US. Cl.138/145; 138/177; 65/33;

65/D1G. 8; 65/D1G. 9; 428/35', 428/195; 428/325; 428/428; 428/433 Int.Cl. B321! 17/06; FI6L 9/14 Field of Search 161/1, 164,192,193; 65/D1G.8, 33, 60, DIG. 9; 106/39 DU, 47, 52; 138/140, 141,145, 177; 117/94, 123A, 124 A; 428/428, 35, 195, 433

[ *Dec. 23, 1975 [56] References Cited UNlTED STATES PATENTS 2,568,4599/1951 Noel 313/221 2,904,713 9/1959 Heraeus 313/112 2,998,675 9/1961Olcott et a1 49/77 3,116,137 12/1963 Vasilos et a1. 65/18 3.275.4939/1966 MacDowell v. 161/1 3,298,553 l/l967 Lusher............... 215/13,370,921 2/1968 Wagstaff Z3/l82 3.445.252 5/1969 MacDowell 106/393,472,667 10/1969 Wagstaff 106/52 3,776,809 12/1973 Baumler et al.161/164 FOREIGN PATENTS OR APPLICATIONS 1,293,554 4/1962 France PrimaryExaminer-George F. Lesmes Assistant Examiner-Alan T. McDonald Attorney,Agent, or FirmBurgess, Dinklage & Sprung ABSTRACT Quartz glass element,such as a diffusion tube useful in the production of semiconductorelements, capable of forming an outer layer of unifdrmly finecrystalline silica such as cristobalite or tridymite when heated to atemperature at which such crystalline silica forms containingcrystallization promoting nuclei having a rate of diffusion in quartzglass less than that of sodium at elevated temperatures. Such nuclei arepreferably present in the outer half of the element wall. When thequartz glass elementyis exposed to elevated temperatures, the nucleipromotes the formation of the outer layer of uniformly fine crystallinesilica which imparts thermal dimensional stability for extended periodsof use at elevated temperatures.

11 Claims, 6 Drawing Figures U.S. Patsnt Dec. 23, 1975 shw 1 of23,927,697

US. Patent Dec 25. 1975 Sheet 2 of2 3,927,697

FIG, 5, COOLING TEMPERATURE. (C.)

QUARTZ GLASS COMPARISON OF CONTRACTION OF QUARTZ GLASS WITH THAT OFCRlSTOBALlTE ON COOLING DOWN FROM "00C.

CONTRACTION IIOO MM. LENGTH) QUARTZ GLASS ELEMENTS RELATED APPLICATIONSThis application is a divisional application of copending applicationSer. No. 166,844, filed July 28, 1971, now US. Pat. No. 3,776,809patented Dec. 4, 1974, said application Ser. No. 166,844 being acontinuationin-part of copending applications Ser. No. 793,775, filedJan. 24, 1969 and Ser. No. 810,713, filed Mar. 26, 1969 both nowabandoned.

BACKGROUND This invention relates to quartz glass elements havingimproved thermal dimensional stability making them suitable for use atelevated temperatures for extended periods of time. More particularly,this invention relates to improved quartz glass elements having a hollowor tubular shape especially useful for producing semiconductor elementsat temperatures higher than previously attainable with prior quartzglass elements.

In the art of producing semiconductor elements such as diodes,four-layer diodes, transistors, integrated circuits and the like,diffusion processes are employed, for example, for doping thesemiconductors. For this purpose, the semiconducting crystal issubjected at high temperatures to the action of different gaseousatmospheres, for example, a phosphorus atmosphere and/or a galliumatmosphere. The semiconducting crystal or crystals which in many caseshave the shape of small plates are then secured on a carrier of quartzglass. For carrying out the diffusion process, this carrier upon whichthe semiconducting crystals are applied is inserted into a diffusiontube of quartz glass in an electrically heated annealing furnace. Thegaseous atmosphere which is predetermined for doping the semiconductingcrystals is then maintained in the diffusion tube at a predetermineddiffusion temperature. This is usually done by conducting the dopingsubstance through the quartz-glass tube in the form of a gaseouscurrent.

In order to carry out their functions properly, the semiconductingelements must possess certain properties, especially insofar as thecross-sectional diffusing shape, the resistance values and thedurability of the carriers are concerned. These properties are, however,detemrined to a very considerable extent by the amount of impurites andalso by the presence of socalled semiconductor poisons which might enterand contaminate the semiconducting elements during the course of theirproduction. Therefore, not only the raw material but also all othermaterials which might possibly affect the purity of these elements inthe course of their production either directly or indirectly have tocomply with extremely high requirements of purity. When quartz glass isemployed as a material in the production of semiconducting elements,these requirements previously necessitated the carriers for thesemiconducting crystals and the diffusion tubes to be made of a quartzglass of such a high degree of purity that it preferably contained atotal of less than 4 ppm (parts per million) of metallic impurites.

In order for the diffusion treatment to be carried out within theshortest possible length of time, it should be effected at the highestpossible temperature since the rate of speed of diffusion increases veryrapidly as the temperature is increased. However, the upper temperaturelimit at which diffusion treatments could previously be carried out inactual practice amounted only to approximately 1,200 to 1,280C. andoften they had to be carried out at a temperature of less than 1,200C.since by remaining continuously in the annealing furnace the diffusiontubes of quartz glass were often plastically deformed to the extent thatthe carriers with the semiconducting crystals thereon would no longerfit into the tubes.

The French Pat. No. 1,293,554 discloses a diffusion tube which consistsof quartz and is provided on its outer side with a coating which willbecome liquid at the temperature at which the semiconducting crystalsare treated. This coating is intended to prevent impurities frompenetrating by diffusion through the quartz diffusion tube into the areawithin the quartz tube which forms the treating chamber for thesemiconducting crystals. However, such diffusion tubes of quartz glasswhich remain continuously in the annealing furnace also have thedisadvantage that they will be plastically deformed very considerablywhen the difiusion temperature is made too high.

The deterioration of diffusion tubes by cracking is caused by irregulardevitrification or recrystallization of the quartz glass brought on byexposing such tubes to elevated temperatures such as those encounteredin preparing semiconductor elements. Prior attempts to overcome thisproblem of thermal instability were directed at preventing or retardingdevitrification or recrystallization. For example, in US. Pat. No.2,904,713, quartz glass is produced wherein substantially nocrystallization seeds are present thus imparting to the quartz glass ahigh resistance against recrystallization. In US. Pat. Nos. 3,370,921and 3,472,667, elemental silicon or boron are utilized to create anoxygen deficiency in quartz bodies thus minimizing crystalline growth.And in US. Pat. No. 2,568,459, a glaze applied to the quartz surfaceretards and largely prevents quartz devitrification by preventing thediffusion of hydrogen through the hot quartz.

In the field of glass ceramics, increased resistance to breaking,cracking or failing due to mechanical impacts has been achievedaccording to US. Pat. Nos. 2,998,675 and 3,275,493 by combining silica,alumina and lithium oxide or magnesium oxide, in certain criticalproportions, with a metal oxide crystallization catalyst. Such glassceramic compositions are subjected to a heat treatment which results ina glass ceramic article having on its surface a thin, semicrystallinelayer, which because it has a linear thermal expansion coefficientsubstantially lower than the interior glass, establishes a compressivestress in and parallel to the surface after the article is cooled. Inother words, the interior glass shrinks more on cooling which tends tocompress the surface layer in effect making it harder thus resulting inan increase in the modulus or rupture strength of the glass ceramicarticle. However, this phenomenon has no effect on the notoriously poorstability of glass ceramics because both the semicrystalline layer andthe interior glass will rapidly devitrify and deteriorate by cracking attemperatures of I000C. and higher as is characteristic of glassceramics.

SUMMARY The present invention provides an improved quartz glass element,such as a diffusion tube useful in the production of semiconductorelements, capable of forming an outer layer of uniformly finecrystalline silica such as cristobalite or tridymite when heated to atemperature at which such crystalline silica forms which containcrystallization promoting nuclei having a rate of diffusion in quartzglass less than that of sodium at elevated temperatures. Such nuclei arepreferably present in the outer half of the element wall. When thequartz glass element is exposed to elevated tempera tures, the nucleipromotes the formation of the outer layer of uniformly fine crystallinesilica which imparts to the element thermal dimensional stability forextended periods of use at elevated temperatures.

In an alternate embodiment, a quartz glass element, with or withoutcrystallization promoting nuclei as described above, is provided with athin outer layer of uniformly fine crystalline silica such ascristobalite or tridymite.

The quartz glass elements of the present invention are utilized intubular form in an improved diffusion process for preparingsemiconductor elements at temperatures of l200C. and higher andpreferably at temperatures of l300C. and higher.

THE DRAWlNGS FIG. la shows a preferred embodiment of a quartz glass tube1 containing substantially uniformly distributed crystallizationpromoting nuclei 2 in the outer portion thereof on a greatly enlargedscale for illustrative purposes only.

FIG. lb is the same as FIG. 10 but illustrates the formation of auniformly fine crystalline silica layer 3 on a greatly exaggeratedscale.

FIG. 2 shows an alternate embodiment of a quartz glass tube 10 providedwith a partial coating of crystalline silica 12.

FIG. 3 is a cross-sectional view taken along line ll-llof FIG. 2.

FIG. 4 is a cross-sectional view of the coated tube of FIGS. 2 and 3provided with a protective coating 13.

FIG. 5 is a graph comparing the contraction of quartz glass with that ofcristobalite on cooling down from 1,100C.

DESCRIPTION It is an object of the present invention to provide aquartz-glass element, for example, of a tubular shape, which is designedso that, when employed in the production of semiconducting elementswhich is carried out at a high temperature, that is, of elements whichis carried out at a high temperature, that is, of elements such asdiodes, four-layer diodes, transistors, integrated circuits or the like,no impurities or semiconductor poisons can pass from this element eitherdirectly or indirectly into the semiconducting crystals, and which alsopermits diffusion treatments to be carried out without detrimentaleffects at still higher temperatures than could previously be employed.

It has now been unexpectedly discovered that this object may be attainedif the outer surface layer of the quartz-glass element such as a tube 1shown in FIG. la contains not only silica but also at least oneadditional crystallization promoting substance 2 which has a degree ofconcentration of more than 4 ppm and up to several hundred ppm,preferably to 800 ppm, and does not form a poison which will affect thesemiconducting element which is to be treated at a temperature abovel,200C. and preferably above 1,280C., and which at temperatures betweenapproximately l,2UUC. and l,380C. has a low rate of speed of diffusioninto silica as compared with the rate of sodium.

Prior to this invention it was conventional in the methods of producingsemiconductors at high temperatures to employ quartz glass of thehighest degree of purity as the material for making the diffusion tubeor, for example, the carrier of the semiconducting crystals. The quartzglass elements according to the invention in contrast contain additionalsubstances of particular types and of particular quantities. As anentirely unexpected and very important advantage of these quartz glasselements it has been found that they will show practically nodeformation even though they are maintained for a considerable length oftime at temperatures of approximately l,30()C. Thus, it has especiallybeen found that, while diffusion tubes which are made in theconventional manner of quartz glass of a high degree of purity are oftenconsiderably deformed, those which are made according to the inventionso that their outer surface layer consists of silica and an additionalsubstance were not deformed. The quartz-glass elements according to theinvention therefore permit, for example, the diffusion treatment ofsemiconducting crystals to be carried out at considerably highertemperatures than could previously be employed and without danger thatthis might cause any detrimental secondary effects.

- The use of such high temperatures permits the length of time of thediffusion treatment to be reduced considerably since the rate of speedof diffusion increases exponentially with the temperature.

If the entire volume of the quartz-glass elements according to theinvention contains crystallization promoting nuclei aside from silica atthe rate of concentration as stated, they may be produced, for example,in a very simple manner from a homogenized melted mass consisting ofsilica and the desired nuclei. This technique is illustrated in Example1 herein.

For producing quartz-glass elements and especially the preferred tubularelements according to the invention in which only the outer surfacelayer of each element contains crystallization promoting nuclei asidefrom silica, it is possible to employ several different methods. Thus,for example, the surface of a tubular element of quartz-glass of a highdegree of purity may be covered with the additional substance containingsuch nuclei, for example, by spraying or vaporizing it thereon,preferably, under a vacuum, and by then subjecting the coated tube to aheating process. An enamel coating and heating process for making such atubular element is illustrated in Example 2 herein.

When the elements of the invention are employed, as for example whenthey are used as diffusion tubes in the semiconductor art, arecrystallization commences at temperatures above I000C. with theformation of cristobalite and/or tridymite. This recrystallizationstarts quickly, uniformly and homogeneously, but on account of thedistribution of the nuclei of the invention it progresses slowly andsteadily. Crystal anisotropy, which may have the effect of diminishingstrength, has not been observed in the quartz glass parts of theinvention. The improved stability of shape at high temperatures which isdisplayed by quartz glass apparatus parts made by the invention isprobably to be attributed to the constance of the growth of thecrystalline silica layer owing to the distribution of nuclei accordingto the invention, and to the shrinkage and tension effects associatedtherewith. Lastly, an additional advantage is that due to thecompression of the quartz glass structure which this produces during theheating thereof, as for example during the doping of semiconductorelements, the penetration of foreign ions which interfere with thedoping process is virtually excluded.

According to another embodiment of the invention, the outside of atleast that part of a tube of quartz glass which is to be exposed to atemperature of more than l,000C. is provided with a coating consistingof a cohesive finely crystalline silica layer which is composed ofcrystalline modifications of quartz, preferably a cristobalite layer,and has a thickness of less than 5 percent and preferably less than 1percent of the thickness of the wall of the quartz-glass element or tubeto which this coating is applied.

It was a surprising fact that the quartz-glass elements or tubesaccording to the invention which were provided with a very thincohesive, finely crystalline outer layer or coating, especially ofcristobalite, were found not to break when a temperature .threshhold ofapproximately 300C. was surpassed either from below or from above,despite the fact which as such is wellknown in the art that, because ofa change in structure, the coefficient of thermal expansion, forexample, of cristobalite possesses a point of unsteadiness within thistemperature range. This is probable due to the fact that the coatinglayer of finely crystalline cristobalite is extremely thin.

The quartz-glass tubes according to the invention which are providedwith such a cohesive, uniformly fine crystalline silica layer orcoating, especially of cristobalite, have also not shown anyconsiderable deformation when remaining for a longer period, forexample, of several weeks, under temperatures, which amounted up toapproximately 1,300C. The excellent mechanical solidity of thesequartz-glass tubes also at temperatures of more than l000C. is probablydue to the fact that the finely crystalline coating or layer of thesetubes specially of cristobalite, is cohesive and that the crystals stillgrow at high temperatures.

Another feature of the invention which has proved to be of greatadvantage involves applying a protective coating over the finelycrystalline layer or coating. Such a protective coating preventsimpurities from penetrating into the quartz-glass tube, for example,from the muffle of the annealing furnace, during the period in which thequartz-glass tube is heated up to the temperature at which the doping ofthe semiconductors is carried out. Such impurities might result in theoccurrence of undesirable crystallizing processes in the quartz-glasstube. It has also been found that for producing such a protective layerit is of advantage to employ materials which at temperatures ofapproximately l,300C. do not evaporate very strongly but already becomeplastic'or soft. Such materials may consist, for example, of germaniumoxide and silicon oxides or glass mixtures which are plastic at atemperature of approximately l300C.

As illustrated in FIG. 2, the quartz-glass tube is provided according tothe invention along a certain length thereof with a cohesive, finelycrystalline coating of crystalline silica 12 that is, preferably with acoating of cristobalite. Of course, it is also possible to provide theentire length of the quartz-glass tube 1 with such a finely crystallinecoating. It is, however, of advantage to apply this coating only uponthose parts of the quartz-glass tube which are exposed to hightemperatures of more than l000C., such as the high temperaturesemiconductor doping zone. By coating only these parts of thequartz-glass tube, the latter retains,

for example, the possibility of connecting ground or ungroundquartz-glass elements to the uncoated parts of the tube and especiallyto the ends thereof.

FIG. 4 illustrates a cross section of a quartz-glass tube 10 whichaccording to the invention is not only provided with a coating 12 offinely crystalline silica especially of cristobalite, but also with aprotective coating 13 which is applied upon the outer surface of thecoating 12.

The production of quartz-glass tubes which are provided with a coatingof cristobalite may be carried out, for example, by sprayingcristobalite powder of high purity upon the quartz-glass tube and byburning this coating into the outer surface of the quartz glass by meansof a flame or in a furnace and, if desired, by maintaining thequartz-glass tube at a high temperature for such a length of time untilthe burned-in nuclei have grown together into a cohesive, finelycrystalline layer as distinguished from a distinct overlying-coating. ifthe area of the quartz-glass tube upon which the cristobalite coating isapplied has, for example, a wall thickness of approximately 2 mm, thethickness of the layer of cristobalite amounts, for example, to lessthan 0.02

The phrase crystallization promoting nuclei is intended to include thosesubstances that will promote the formation of crystalline silica such ascristobalite and tridymite for example when a quartz-glass element ofthe invention is heated to a temperature at which such crystallinesilica forms.

For purposes of this invention and particularly in the case of diffusiontubes, the temperature at which crystalline silica forms falls withinthe range of 900 to I550C. preferably in the range of 900C. to l350C.Crystalline silica is known to have several forms among which are alphaand beta quartz, alpha and beta cristobalite and alpha and betatridymite. In the temperature ranges referred to above, the formation ofcertain crystalline forms is favored and two or more crystalline formsmay be present at the same time. For example, in the temperature rangesindicated it is believed that beta cristobalite forms faster than otherforms of crystalline silica and for this reason is probably thepredominate type of crystalline silica formed according to thoseinvention. However, this invention is in no way limited or restricted tothe formation of any particular form or forms of crystalline silica. itis sufficient to form a layer of crystalline silica (whatever its formor forms) as shown in FIG. 1(b) by reference number 3 to obtain thehighly desirable properties and advantages of this invention.

It should also be understood that crystalline silica, regardless of typeor types, is converted to amorphous or vitreous silica when heated toits fusion temperature which is about l730C, preferably above about1,750C, for a period of time sufficient to complete the conversion.Vitreous silica once formed by fusion remains in this form when cooleddown to ambient temperatures. Is is only when an article formed fromvitreous silica is reheated does devitrification or recrystallizationoccur. The amorphous form of silica is also known as quartz glass, fusedsilica, vitreous silica, vitreous quartz and fused quartz. Regardless ofthe nomenclature, the important difference is that quartz glass elementsof the invention are amorphous at the outset and the nuclei presenttherein forms a layer of crystalline silica when the element is exposedto temperatures in the range of 900C to l550C.

Thus, the formation of quartz-glass elements containing nuclei can becarried out without forming crystalline silica due to the fact that attemperatures above the fusion temperature of silica, about l730C., onlyamorphous silica is formed. Thus, it is possible to supply semiconductormanufacturers with nuclei containing quartz-glass tubes after which thebeneficial crystalline silica layer is formed during the diffusionprocess.

The crystallization promoting nuclei are atomic in dimension and includeone or more atoms, ions and/or individual molecules and are the centersaround which the crystalline silica forms and grows according to theinvention. Suitable nuclei have a rate of difi'usion in quartz-glassless than that of sodium at elevated tern peratures, for example 1000C.or higher, and include an element from Group IV of the periodic table,boron, aluminum, phosphorus, antimony, zinc, mangesium, calcium, galliumand mixtures thereof. Compounds from which nuclei are obtained includethe oxides, carbides or nitrides of any of the foregoing, as for examplealuminum nitride, aluminum oxide, germanium oxide, tin oxide, siliconcarbide, silicon nitride, silica suboxides, and the like. Zinc,magnesium, calcium, tin, boron, phosphorus, aluminum, titanium,zirconium hafnium, antimony and gallium ions because of their large ionradius have been found to be especially useful for fonning finecrystalline silica layers. Most preferred is aluminum.

According to the present invention, crystallization promoting nuclei areincorporated into the molecular structure of the quartz glass. Methodsfor accomplishing this are illustrated in the examples. For instance, inExample 1, a solution of a nuclei compound is coated on quartz powderwhich is subsequently fused into quartz glass. The fusion step alsodecomposes the nuclei compound leaving only the nuclei such as one ormore metal ions which are entrapped and incorporated into the molecularstructure of the quartz glass. This quartz glass containing nuclei isthen drawn into a tube using conventional techniques which can be useddirectly or slipped over and fused with a pure quartz glass tuberesulting in a tube as shown in F IG. 1(a). ln Example 2, the quartzglass containing nuclei is ground and added to an enamel compositionwhich is coated onto and fused with a pure quartz glass tube againresulting in a tube as shown in FIG. 1(a).

During the first four to twenty hours of use of a tube according to theinvention in a semiconductor doping process, it is believed that auniformly fine crystalline silica layer forms to a depth approximatelyequal to the depth of the nuclei. Further exposure to elevatedtemperatures causes the nuclei to diffuse or migrate further into thetube wall and the crystalline silica layer to continue to growinherently. However, once the uniformly fine crystalline layer isformed, nuclei diffusion and inherent crystalline growth proceeduniformly and slowly resulting in greatly improved tube life and theability to use higher temperatures than could be used with prior quartzglass diffusion tubes.

The nuclei used in this invention are present in an amount of from about4 to about 800 ppm. Uniform distribution of the nuclei is preferred inorder to fonn uniformly fine crystalline silica layers. Concentrationsof nuclei ranging between about to 800 ppm. are especially preferred.

The concentrations of nuclei at the outer surface of the quartz-glasselement is generally less than about 5.10' nuclei per sq. cm. andpreferably in the range of about I. l0 to about 5. l0' nuclei per sq.cm. Stated in different terms, the surface concentration-of nuclei is inthe range of about 5. I0 to about 25 micrograms per sq. cm.

In the present invention, rather than attempt to prevent or retarddivitrification of quartz glass as taught by the prior art, theformation of crystalline silica is promoted in a uniform, very finemanner to yield modified quartz glass elements having totally unexpectedlonger use at temperatures higher than those that could previously beemployed, e.g., l300C. and higher.

Also, as illustrated by the graph which comprises FIG. 5, thecoefficient of thermal expansion and contraction of crystalline silicasuch as cristobalite is appreciably greater than quartz glass. Thus,when a crystalline silica layer is formed in a quartz glass element atelevated temperature and cooled down, the interior quartz glass shrinksless than the outer crystalline layer tending to stretch same therebyestablishing a tensile stress in and parallel to the outer crystallinelayer. The mechanical stability (surface hardness) of an articleaccording to the invention is less at room temperature than themechanical stability of customary quartz glass also at room temperature.With respect to the known glass ceramic articles having a compressivestress layer, the object is to achieve above all a high mechanicalstability at room temperature, whereas their dimensional stability atelevated temperature is reduced. As against that, the object of theinvention is to produce articles having a high dimensional stability atroom temperature is actually reduced.

Thus, the present invention in its preferred embodiment of a diffusiontube for producing semiconductor elements may have crystallizationpromoting nuclei uniformly dispersed throughout only the outer portionof the tube to a depth no greater than one-half of the tube wallthickness. ln addition, the outer surface of a quartz glass tube, withor without nuclei as described herein, may be provided with a coating ofvery pure crystalline silica powder such as cristobalite and then heatedto form a crystalline silica coating on or a layer within the quartzglass tube. In the instance where crystalline silica powder is coatedonto a tube containing nuclei, such nuclei promote the further formationof a layer of crystalline silica in the tube. Because ap' plying aseparate coating of crystalline silica involves powder coatingtechniques and obtaining good adhesion, it is preferred to employ tubesof quartz glass containing only nuclei as described herein andpermitting the beneficial crystalline silica to form upon exposure toheat in the diffusion process, for example.

In prior quartz glass elements, impurities (such as those sought to beremoved in U.S. Pat. No. 2,904,713) are believed to be the seeds fordevitrification which, one initiated proceeds nonuniformly anduncontrolled until the entire element is devitrified. Thisdevitrification known for diffusion tubes of luminous-discharge lampsand which results from the accidental and nonuniform distribution ofimpurities leads to a nonuniform devitrification of the diffusion tubecreating nonuniformly distributed stresses in the tube resulting in thebreakage of the tube. In the present invention, the devitrificationprocess is utilized in a unique way resulting in higher use temperaturesover longer periods of time than theretofore available. The presence ofnuclei or a crystalline silica coating as described herein causesdevitrification to occur but with the formation of a uniform, very finecrystalline silica layer which, be-

cause of its uniform and fine nature, results in very slow progressivedevitrification. This slow down of devitrification has resulted in a 25to 50 percent increase in the useful life of quartz glass diffusiontubes.

The following examples are intended to illustrate the present inventionwithout limiting the same in any manner.

EXAMPLE 1 Fabricating procedure for a diffusion tube with uniformlydispersed crystallization promoting nuclei thhroughout the outer portionof the wall of the tube.

Pure quartz crystal granules (e. g. 10 kgs) as they are customarily usedfor the fusion of pure quartz glass, are wetted by pouring over them aconcentrated aqueous solution of aluminum nitriate which contains 8 g ofAl-ions, and subsequently dried with continuous stirring. The resultingquartz glass granules have the Al salt adhering to them and have anAl-ion content of L200 ppm. These granules are placed into a graphitecrucible and heated in a vacuum melting furnace steadily and slowly (for3 to 4 hours) to a melting temperature (approx. l,750C) and, bysubsequently maintaining the melting temperature during 30 to 60minutes, fused into clearly transparent quartz glass. The vacuum meltingfurnace is an electrically heated (inductively or by current passage)furnace within a vacuum chamber which, prior to and during the meltingprocedure, is evacuated to a pressure of approx. l Torr by mechanicalvacuum pumps. The resulting fused quartz glass block contains 200 to 800ppm of Al, and is subsequently drawn to a tube in an electrically heatedquartz glass drawing furnace. The tube drawing furnace essentiallyconsists of a graphite crucible wherein the quartz glass block is lying;at its bottom the crucible has an opening with a nozzle and a mandrelforming the outside and the inside surface of the drawn tube during thedrawing process. The electrical heating elements are arranged in thesame way as in the melting furnace. However, in the tube drawing, noevacuation takes place. During drawing the drawn Al-containing tube isdimensioned in such a way that it can be comfortably slid over a quartzglass tube without additives and is then fused together with same on aglass blowers lathe to form one tube unit. Basically, this heatingprocess (fusing together of inside and outside tubes) can also takeplace on a tube drawing bench, at the same time reducing the fused tubeportion to a narrower tube. The thickness of the crystallizationpromoting nuclei containing outer portion of the wall of the tube isobtained from the purely geometric wall thickness ratio between theinner pure quartz glass tube and the outer Al-containing quartz glasstube.

EXAMPLE 2 Another method for producing tubes according to the inventionhaving a predominantly thin outer wall portion with respect to theentire wall is to grind Alcontaining quartz glass made according toExample 1 into quartz glass powder (1-20 a grain size). Thereupon anenamel-like paste or suspension is made from this powder according tothe following formula:

10 1.000 g of the ground quartz glass powder is mixed with 500 g ofbi-distilled water to which was previously added I g of dextrineadhesive. In order to make this suspension more stable, 1 20 g of puremolecular-disperse silicic acid may be added. This suspension is thenapplied to the outer surface of a pure quartz glass cylinder (approx.4-6 g/dm) and dried. Thereupon this cylinder is drawn into a tubeaccording to the invention on a tube drawing bench as described inExample 1.

EXAMPLE 3 The production of stabilized tubes according to the inventionhaving an outer protective layer is achieved by applying on a stabilizedtube a known, more readily fusible glass composition in the form of apowder or in the form of a solution in accordance with known enamellingtechniques or in the form of a thin glass film in accordance with knownglass processing techniques (e.g. in the form of a thin-walled tube) andfusing into a tube unit in a further heating process.

This process can also be used for tubes prepared according to Example 2fusing together in the subsequent heating process the protective coatingas well as the stabilizing coating with the pure quartz glass tube orhollow cylinder.

What is claimed is:

1. Quartz glass element capable of forming an outer layer of uniformlyfine crystalline silica when heated to a temperature at which suchcrystalline silica forms containing from about 4 to about 800 ppm ofcrystallization promoting nuclei having a rate of diffusion in quartzglass less than that of sodium at elevated temperatures, said nucleibeing present in the entire volume of said glass element.

2. Element of claim 1 wherein said nuclei are present in a concentrationof from about [0 to about 800 ppm.

3. Element of claim 1 wherein said nuclei are selected from the group ofa Group lV element, boron, aluminum, phosphorus, antimony, zinc,magnesium, calcium, gallium, and mixtures of the foregoing.

4. Element of claim 1 wherein said element is a diffusion tube forproducing semiconductor elements.

5. Element of claim 1 heated to a temperature at which crystallinesilica forms.

6. Element of claim 1 having a coating thereon of uniformly finecrystalline silica.

7. Quartz glass element consisting essentially of a quartz glass tubehaving an outer cohesive coating of uniformly fine crystalline silica.

8. Element of claim 7 wherein said crytalline silica is selected fromthe group of cristobalite and tridymite.

9. Element of claim 7 wherein said element is a diffusion tube forproducing semiconductor elements.

10. Diffusion tube of claim 9 wherein only a central lengthwise portionof the quartz glass tube is provided with said crystalline silica outercoating.

1 l. Diffusion tube of claim 4 wherein only the central section inlengthwise direction thereof contains said crystallization promotingnuclei.

1. QUARTZ GLASS ELEMENT CAPABLE OF FORMING AN OUTER LAYER OF UNIFORMLYFINE CRYSTALLINE SILICA WHEN HEATED TO A TEMPERATURE AT WHICH SUCHCRYSTALLINE SILICA FORMS CONTAINING FROM ABOUT 4 TO ABOUT 800 PPM OFCRYSTALLIZATION PROMOTING NUCLEI HAVING A RATE OF DIFFUSION IN QUARTZGLASS LESS THAN THAT OF SODIUM AT ELEVATED TEMPERATURES, SAID NUCLEIBEING PRESENT IN THE ENTIRE VOLUME OF SAID GLASS ELEMENT.
 2. Element ofclaim 1 wherein said nuclei are present in a concentration of from about10 to about 800 ppm.
 3. Element of claim 1 wherein said nuclei areselected from the group of a Group IV element, boron, aluminum,phosphorus, antimony, zinc, magnesium, calcium, gallium, and mixtures ofthe foregoing.
 4. Element of claim 1 wherein said element is a diffusiontube for producing semiconductor elements.
 5. Element of claim 1 heatedto a temperature at which crystalline silica forms.
 6. Element of claim1 having a coating thereon of uniformly fine crystalline silica. 7.QUARTZ GLASS ELEMENT CONSISTING ESSENTIALLY OF A QUARTZ GLASS TUBEHAVING AN OUTER COHESIVE COATING OF UNIFORMLY FINE CRYSTALLINE SILICA.8. Element of claim 7 wherein said crytalline silica is selected fromthe group of cristobalite and tridymite.
 9. Element of claim 7 whereinsaid element is a diffusion tube for producing semiconductor elements.10. Diffusion tube of claim 9 wherein only a central lengthwise portionof the quartz glass tube is provided with said crystalline silica outercoating.
 11. Diffusion tube of claim 4 wherein only the central sectionin lengthwise direction thereof contains said crystallization promotingnuclei.